This document defines terms for industrial nano-manufacturing processes in the field of nanotechnologies. All process-related terms contained in this document are relevant to industrial nano-manufacturing, but many of the processes listed are not exclusively applicable to the nano-scale. Terms that are not exclusive in this way are marked as such in the definitions. Depending on controllable conditions, such processes can lead to material properties on a nanoscale or, alternatively, on a larger scale. In connection with industrial nano-manufacturing there are many other terms that designate tools, parts, materials, methods for system control or measurement technology methods, but which are not the subject of the scope of this document.