Nanotechnologies - Measurements of particle size and particle shape distributions using transmission electron microscopy (ISO 21363:2020)

This document specifies how transmission electron microscopy images are acquired, measured and analyzed to determine nanoscale particle size distributions and particle shape distributions. This document largely applies to nano-objects and particles larger than 100 nm. The exact working range of the method depends on the required measurement uncertainty and the performance of the transmission electron microscope. These elements can be assessed according to the requirements described in this document.