Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Standard Number prСД ISO/TR 23397:2020
Organization Bulgarian Institute for Standardization Bulgaria
Level National
Category Guide | Practice
Status
  • MAR 2021 Under Drafting
ABSTRACT
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.