Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

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Standard Number PNS ISO 14644-12:2021
Organization Bureau of Philippine Standards Philippines
Level National
Category Specification
Status
  • JAN 2021 Published
ABSTRACT

This Standard covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.