Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Standard Number PNS IEC/TR 63258:2022
Organization Bureau of Philippine Standards Philippines
Level National
Category Guide | Practice
Status
  • JUN 2022 Published
ABSTRACT

This Standard is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films.