Semiconductor devices - Micro-electromechanical devices. Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures

Semiconductor devices - Micro-electromechanical devices. Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures

Standard Number BS EN 62047-45 Ed.1.0
Organization British Standards Institution UK
Level National
Category Test Method | Characterization | Measurement
Status
  • JUL 2022 Under Definition