Semiconductor devices - Micro-electromechanical devices. Part 46: Silicon based MEMS fabrication technology – Measurement method of tensile strength of nano-scale membrane

Semiconductor devices - Micro-electromechanical devices. Part 46: Silicon based MEMS fabrication technology – Measurement method of tensile strength of nano-scale membrane

Standard Number BS EN 62047-46 Ed.1.0
Organization British Standards Institution UK
Level National
Category Test Method | Characterization | Measurement
Status
  • JUL 2022 Under Definition