Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

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Standard Number prEN IEC 63567-3
Organization European Committee for Standardization European Union
Level International
Category Test Method | Characterization | Measurement
Status
  • AUG 2025 Under Drafting