Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

Standard Number DIN ISO 18516
Organization German institute for standardization Germany
Level National
Category Test Method | Characterization | Measurement
Status
  • NOV 2020 Published