Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration

Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration

Standard Number DIN EN ISO 14644-12
Organization German institute for standardization Germany
Level National
Category Classification | Categorization
Status
  • APR 2013 Published
  • JUL 2019 Withdrawn