| Standard Number | IEC TS 62607-6-5:2022 |
|---|---|
| Organization |
International Electrotechnical Commission
|
| Level | International |
| Category | Test Method | Characterization | Measurement |
| Status |
|
IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristicscontact resistance, and
sheet resistance
for graphene-based materials and other two-dimensional materials by atransmission line measurement.
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.
