Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology – Measurement method of tensile strength of nanoscale membrane

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology – Measurement method of tensile strength of nanoscale membrane

Standard Number IEC 62047-46 ED1
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JUL 2022 Under Development