Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Standard Number IEC 62047-45 ED1
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JUL 2022 Under Development