IEEE/IEC Draft Standard for Large Scale Manufacturing of Nanoelectronics

IEEE/IEC Draft Standard for Large Scale Manufacturing of Nanoelectronics

Standard Number P62659_D2
Organization IEEE Standards Association World
Level International
Category Management System
Status
  • JAN 2013 Published
  • JUN 2019 Under Development
ABSTRACT
This standard provides a framework for introducing nanomaterials such as graphene into large scale, high volume manufacturing in established semiconductor factories (fabs). Since semiconductor fabs must incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor fabs, and must be introduced in a structured and methodical way.