Cleanrooms and Controlled Environments — Part 12: Requirements for monitoring air quality based on nanoscale particle concentration

Cleanrooms and Controlled Environments — Part 12: Requirements for monitoring air quality based on nanoscale particle concentration

Standard Number KS I ISO 14644-12
Organization Korean Agency for Technology and Standards South Korea
Level National
Category Specification
Status
  • AUG 2020 Published
ABSTRACT
This standard deals with the monitoring of air quality by particle in terms of the concentration of airborne nanoscale particles.