Nanomanufacturing — Large scale manufacturing for nanoelectronics

Standard Number KS C IEC IEEE 62659
Organization Korean Agency for Technology and Standards South Korea
Level National
Category Management System
  • MAY 2017 Published
This standard provides a production system that incorporates nanoelectronics technology into large-scale semiconductor manufacturing facilities and mixes nanomaterials (eg, carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities must be constructed in a manner that ensures high yield, there are strict requirements for operation of the manufacturing process. Nanomaterials are a potential source of contamination in semiconductor manufacturing facilities and need to be used in an organized and systematic manner. This standard addresses the steps that make it possible to introduce nanomaterials into semiconductor manufacturing facilities. This process is described below by areas such as raw material acquisition, material processing, design, IC (integrated circuit) fabrication, evaluation, and end use. These activities are key steps in the supply chain in semiconductor manufacturing facilities.