plasma etch and strip processes for micro-, nano- and bio-technologies (PESM 2023)

PESM 2023 is the 13th event in a series devoted to plasma etch and strip processes for micro-, nano- and bio-technologies. This workshop will be held in June 2023 in Grenoble (France).  

The objective of the workshop is to provide a forum for open discussions between science and technology. It is not only dedicated to scientists, process engineers and Ph-D students, but also to industrial partners in the field of dry etching, including plasma processing but also other vacuum-based removal techniques (ion beam, neutral beam, gaseous thermal etching, etc...). Topics may include both fundamental and applied research highlights, as well as issues related to the introduction of new technologies into manufacturing.

Topics:

- Plasma etching processes for semiconductors (Si, III-V and III –N,…)

- Plasma etching processes for advanced memory technologies

- Plasma processes for more than Moore applications

- Emerging plasma etching concept and technology

- Plasma diagnostic and simulation