Nanomanufacturing - Key Control Characteristics. Part 8-5: Nano-enabled metal-oxide interfacial devices - Oxygen distribution: Secondary ion mass spectrometry (SIMS)
| Standard Number | PD IEC/TS 62607-8-5 |
|---|---|
| Organization |
British Standards Institution
|
| Level | National |
| Category | Test Method | Characterization | Measurement |
| Status |
|