Nanotechnology – Measuring the distribution of particle size and shape with SEM

This document specifies methods of determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and by obtaining and reporting accurate results. NOTE 1 This document applies to particles with a lower size limit that depends on the required uncertainty and on the suitable performance of the SEM, which is to be proven first -according to the requirements described in this document. NOTE 2 This document also applies to SEM-based size and shape measurements of larger than nanoscale particles.