State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for calibration
| Standard Number | GOST R 8.644-2008 |
|---|---|
| Organization |
Federal Agency on Technical Regulating and Metrology
|
| Level | National |
| Category | Test Method | Characterization | Measurement |
| Status |
|
ABSTRACT
This standard applies to relief measures in the nanometer range with a trapezoidal profile of elements, the linear dimensions and material for which comply with the requirements of GOST R 8.628. Relief measures are used to measure linear dimensions in the range from 10 in the st. minus 9 to 10 in the st. minus 6 m. This standard establishes a methodology for calibrating relief measures.