State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure
| Standard Number | GOST R 8.659-2009 |
|---|---|
| Organization |
Federal Agency on Technical Regulating and Metrology
|
| Level | National |
| Category | Test Method | Characterization | Measurement |
| Status |
|
ABSTRACT
This standard applies to measuring instruments (MI) for the characteristics of ultraviolet (UV) radiation used in technological control in nanophotolithography and establishes a methodology for their initial and periodic verification.