State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for verification
| Standard Number | GOST R 8.629-2007 |
|---|---|
| Organization |
Federal Agency on Technical Regulating and Metrology
|
| Level | National |
| Category | Test Method | Characterization | Measurement |
| Status |
|
ABSTRACT
This standard applies to nanometer-range relief measures with trapezoidal element profiles, the linear dimensions of which, and the material used for their manufacture, comply with the requirements of GOST R 8.628. Relief measures are used to measure linear dimensions in the range from 10 in the standard minus 9 m to 10 in the standard minus 6 m. This standard establishes a methodology for the initial and periodic verification of relief measures. The verification interval for relief measures is one year.
Amendment: GOST R 8.629-2007