☰
✕

State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Requirements for geometrical shapes, linear sizes and manufacturing material selection

Link To Website Link To Webstore
Standard Number GOST R 8.628-2007
Organization Federal Agency on Technical Regulating and Metrology
Level National
Category Test Method | Characterization | Measurement
Status
  • FEB 2008 Published
  • DEC 2010 Revised