Nanomanufacturing - Key Control Characteristics - Part 8-5: Nano-enabled metal-oxide interfacial devices - Oxygen distribution: Secondary ion mass spectrometry (SIMS)
| Standard Number | IEC TS 62607-8-5 |
|---|---|
| Organization |
International Electrotechnical Commission
|
| Level | International |
| Category | Test Method | Characterization | Measurement |
| Status |
|