Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
| Standard Number | ISO/DIS 19606 |
|---|---|
| Organization |
International Electrotechnical Commission
|
| Level | International |
| Category | Test Method | Characterization | Measurement |
| Status |
|
ABSTRACT
ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.