IEC TS 62607-6-xx: Nanomanufacturing - Key control characteristics - Part 6-xx: Two-dimensional materials - Layer measurement: Pseudo-Brewster angle method

This part of IEC 62607 establishes a standardized method to determine the key control characteristic · layer number (thickness) of two-dimensional materials, derived from the angular position of the pseudo-Brewster angle and associated optical response features. The key control characteristic is obtained from measured angle-dependent reflectance behaviour and its evaluation according to defined criteria for monolayer, bilayer, and few-layer structures. of two-dimensional materials such as graphene and transition-metal dichalcogenides (TMDCs) for process monitoring, quality assessment, and device-oriented material selection by · the pseudo-Brewster angle method.