Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
| Standard Number | IEC/TR 63258:2021 |
|---|---|
| Organization |
International Organization for Standardization
|
| Level | International |
| Category | Guide | Practice |
| Status |
|
ABSTRACT
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.