Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Standard Number ISO 14644-12:2018
Organization International Organization for Standardization
Level International
Category Specification
Status
  • AUG 2018 Published
  • JUL 2023 Under Review
ABSTRACT

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.