Evaluation of spatial resolution of NSOM(Near-field Scanning Optical Microscope)

Standard Number KS D 2713:2006
Organization Korean Agency for Technology and Standards
Level National
Category Specification
Status
  • DEC 2006 Published
  • OCT 2011 Reviewed and Confirmed
  • DEC 2016 Revised
  • MAY 2021 Reviewed and Confirmed
ABSTRACT

This standard applies only to NSOM equipment of illumination / transmission / opening type, NSOM equipment of illumination concentrating / opening type, and NSOM image obtained by using such equipment.