Tensile specimen of single- and poly-crystal nano/micro thin film materials
| Standard Number | KS D 2715 |
|---|---|
| Organization |
Korean Agency for Technology and Standards
|
| Level | National |
| Category | Specification |
| Status |
|
ABSTRACT
This standard specifies the tensile test specimens used for the tensile test of mono-crystalline and polycrystalline thin film materials with nano / micro-scale thickness made using semiconductor processes.