Tensile specimen of single- and poly-crystal nano/micro thin film materials
Standard Number | KS D 2715 |
---|---|
Organization |
Korean Agency for Technology and Standards
|
Level | National |
Category | Specification |
Status |
|
ABSTRACT
This standard specifies the tensile test specimens used for the tensile test of mono-crystalline and polycrystalline thin film materials with nano / micro-scale thickness made using semiconductor processes.