Nanotechnology — description, measurement and dimensional quality parameters of artificial grids

This standard focuses on the specification of quality parameters expressed as deviations of the grid geometry from the nominal position and provides guidance on the application of various categories of measurement and evaluation methods used for the calibration and characterization of artificial grids. This standard is intended to facilitate communication between manufacturers, users, and calibration laboratories addressing the characterization of dimensional quality parameters of artificial lattices used in nanotechnology. This standard supports quality assurance in the production and use of artificial lattices in various applications of nanotechnology. The methods defined and described are universally applicable to a variety of grids, but are centered on one-dimensional (1D) and two-dimensional (2D) grids.