Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration

NEN-EN-ISO 14644-1 specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7. Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0,1 μm to 5 μm are considered for classification purposes. The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination of the concentration of airborne particles, equal to and greater than the specified sizes, at designated sampling locations. This part of ISO 14644 does not provide for classification of particle populations that are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) will be addressed in a separate standard to specify air cleanliness by nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations of macroparticles (particles larger than 5 μm). This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, viable or other nature of airborne particles.