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General rules for nanometer-scale length measurement by SEM

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Standard Number GB/T 20307-2006
Organization Standardization Administration of China
Level National
Category Specification
Status
  • JUL 2006 Published
  • DEC 2016 Reviewed and Confirmed
ABSTRACT
This standard specifies the basic principles of nanoscale length measured with scanning electron microscopy (sem). Suitable for measuring the 10 nm - 500 nm point or line spacing.