Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS
Standard Number | GB/T 42896-2023 |
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Organization |
Standardization Administration of China
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Level | National |
Category | Test Method | Characterization | Measurement |
Status |
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ABSTRACT
This document describes the requirements and tests for impact testing along the thickness direction of nanoscale membrane structures involved in silicon-based MEMS manufacturing technology method.
This document is suitable for testing the impact resistance of nanoscale structures manufactured using microelectronics technology under an impact load.