Micro-electromechanical systems(MEMS) technology - Tensile strength test method for nano-scale membranes of silicon based MEMS
| Standard Number | GB/T 42897-2023 |
|---|---|
| Organization |
Standardization Administration of China
|
| Level | National |
| Category | Test Method | Characterization | Measurement |
| Status |
|
ABSTRACT
This document describes the requirements and tests for in-situ testing of the axial tensile strength of nanometer-thick films involved in silicon-based MEMS processing method.
This document is suitable for tensile strength testing of nanometer-thick films manufactured using microelectronics processes.