Nanotechnologies - Measurements of particle size and shape distributions by scanning electron microscopy

This document specifies the determination of nanoparticle size and Shape distribution method.

Note 1.The lower limit of particle size measurement applicable to this document depends on the SEM performance and measurement uncertainty requirements. The relevant information is based on the requirements described in this document. Prove it.

Note 2.This document is also applicable to the measurement of particle size and shape distribution of particles larger than nanometer scale based on SEM image method.