Nanotechnologies - Description, measurement and dimensional quality parameters of gratings

This document defines common terminology for explaining global and local quality parameters of gratings in terms of deviations of grating features from nominal positions and provides Guidelines for the classification of measurement and evaluation methods for determining parameters and for ensuring the production and use of gratings in different areas of nanotechnology application Quality guide. The methods defined and described in this document are applicable to different types of gratings, but this document focuses on one-dimensional (1D) and two-dimensional (2D) gratings. Gratings are designed to facilitate use among manufacturers, users and calibration laboratories in the field of nanotechnology involving the characterization of grating size quality parameters.