Surface chemical analysis - Atomic force microscopy - Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement

This document specifies two methods for characterizing the AFM probe shape, specifically the shank and subtip profiles. By projecting the AFM probe tip profile onto a specified plane, or by projecting the features of the probe handle onto the plane under certain operating conditions Among them, the latter method can show the effectiveness of the probe when used for depth measurement of narrow grooves and similar contour structures. The test piece is suitable for probes with a radius greater than 5u0, where u0 is the uncertainty in the width of the ridge structure of the reference sample used to characterize the probe.