Microbeam analysis. General guide for the specification of nanometer thin reference materials for analytical transmission electron microscope (AEM/EDS)

This standard specifies the analysis of electron microscopy (AEM/EDS) that is equipped with a transmission electron microscope or scanning electron microscope equipped with X-ray energy attachments Spectroscopy (EDS), measuring the scale factor KA-B nano-thin standard technical requirements, test conditions and measurement methods. This standard applies to the use of electron microscopy analysis (AEM/EDS) micro-area element of the inorganic thin samples of quantitative analysis. This standard does not include Machines and biological standards.