Measurement methods of drift rate of scanning probe microscope
Standard Number | GB/T 29190-2012 |
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Organization |
Standardization Administration of China
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Level | National |
Category | Terminology | Vocabulary | Definition |
Status |
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ABSTRACT
This standard specifies the SPM drift rate terminology and definitions, abbreviations, measurement procedures, performance parameters specifications, and scanned images based on SPM drift rate measurement basic method.