Measurement methods of drift rate of scanning probe microscope
| Standard Number | GB/T 29190-2012 |
|---|---|
| Organization |
Standardization Administration of China
|
| Level | National |
| Category | Terminology | Vocabulary | Definition |
| Status |
|
ABSTRACT
This standard specifies the SPM drift rate terminology and definitions, abbreviations, measurement procedures, performance parameters specifications, and scanned images based on SPM drift rate measurement basic method.