Determination of particle size distribution-Single particle light interaction methods-Part3:Light extinction liquid-borne particle counter
Standard Number | GB/T 29024.3-2012 |
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Organization |
Standardization Administration of China
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Level | National |
Category | Specification |
Status |
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ABSTRACT
This standard specifies the method of liquid photoresist particle counter (LELPC) calibration and verification method, the instrument used to measure particles suspended in a liquid particle size and particle number concentration.