Precise Measuring Tool for Light Source Could Advance Chipmaking
Date | 19th, Sep 2023 |
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Source | Photonics Media - Scientific News Websites |
DESCRIPTION
To improve the quality of microchips and make the chipmaking process more efficient, researchers at the University of Twente’s MESA+ Institute of Nanotechnology developed an extreme ultraviolet (EUV) broadband imaging spectrometer. The new spectrometer simultaneously measures the size and color of the light emitted by a plasma source.