Imec, Mitsui Chemicals to Partner; Raytheon Receives $10M DARPA Award: Week in Brief: 12/15/23
Date | 15th, Dec 2023 |
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Source | Photonics Media - Scientific News Websites |
DESCRIPTION
Imec and Mitsui Chemicals, a Japanese chemical company and EUV pellicle supplier, have entered into a strategic partnership on the commercialization of carbon-nanotube (CNT)-based pellicles for extreme-ultraviolet (EUV) lithography. Under this partnership, Mitsui Chemicals will integrate imec’s CNT-based pellicle innovation into Mitsui Chemicals’ pellicle technology to achieve full production specifications, targeting its introduction in high-power EUV systems in the 2025-2026 timeframe.