Sequential Infiltration Synthesis (SIS) Significantly Improves EUV Patterning
| Date | 27th, Feb 2019 |
|---|---|
| Source | AZoNano - Nanotechnology Websites |
DESCRIPTION
This week, at the SPIE Advanced Lithography conference 2019, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, demonstrates the positive impact of...