Sequential Infiltration Synthesis (SIS) Significantly Improves EUV Patterning
Date | 27th, Feb 2019 |
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Source | AZoNano - Nanotechnology Websites |
DESCRIPTION
This week, at the SPIE Advanced Lithography conference 2019, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, demonstrates the positive impact of...