EV Group Brings Nanoimprint Lithography to Full-Scale Production with the First Fully Integrated 300-mm Nanoimprint Lithography Track System
| Date | 13th, Jun 2019 |
|---|---|
| Source | AZoNano - Nanotechnology Websites |
DESCRIPTION
EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today unveiled the HERCULES® NIL 300 mm -- a fully integrated...