High-resolution lithography for nanoporous thin films
| Date | 28th, Oct 2020 |
|---|---|
| Source | Phys.org - Scientific News Websites |
DESCRIPTION
Researchers at KU Leuven (Belgium) developed a high-resolution lithography process to pattern metal-organic framework (MOF) films. This work, published in Nature Materials, will speed up the integration of these materials into microchips.