Researchers develop Si-based super-high frequency nanoelectromechanical resonator

Recently, a group led by Prof. GUO Guoping from the University of Science and Technology of China of the Chinese Academy of Sciences, collaborating with Prof. ZHANG Zhen's group from Uppsala University, Sweden, designed and fabricated CMOS-compatible suspended SHT devices which worked as super-high frequency nanoelectromechanical resonators. The work was published in Advanced Materials.