MEMS Resonator Based on Gallium Nitride Maintains Stability at High Temperature

A MEMS resonator that achieves operational stability under high temperatures by regulating the strain of imparted heat from gallium nitride has demonstrated qualities that show its promise as a highly sensitive oscillator device in the pursuit of enhanced 5G communication. Liwen Sang, an independent scientist at the International Center for Materials Nanoarchitectonics and the National Institute for Materials Science and a JST PRESTO (Japan Science and Technology Agency Precursory Research for Embryonic Science and Technology) researcher, developed the device. To improve on temporal performance, Sang fabricated a high-quality GaN epitaxial film on a silicon substrate, using metal organic chemical vapor deposition to fabricate the...