E-Beam Atomic-scale 3-D ‘Sculpting’ Could Enable New Quantum Nanodevices | Research Horizons

By varying the energy and dose of tightly focused electron beams, researchers have demonstrated the ability to both etch away and deposit high-resolution nanoscale patterns on two-dimensional layers of graphene oxide. The 3D additive/subtractive “sculpting” can be done without changing the chemistry of the electron beam deposition chamber, providing the foundation for building a new generation of nanoscale structures. Electronics and Nanotechnology Materials