High Performance R-Theta 2-Axis Stages for Nanometer Precision Motion in Semiconductor and Laser Processing Applications
| Date | 28th, Jan 2022 |
|---|---|
| Source | AZoNano - Nanotechnology Websites |
DESCRIPTION
R-Theta stage motion systems are better suited to circular, elliptic and spiral motion patterns than conventional Cartesian 2-axis XY linear translation stages. Image Credit: PI (Physik...